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Penulis: Matthew Pelliccione

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Matthew Pelliccione & Toh-Ming Lu: Evolution of Thin Film Morphology
Thin?lmdepositionisthemostubiquitousandcriticaloftheprocessesusedto manufacture high-tech devices such as microprocessors, memories, solar cells, microelectromechanicalsystems(MEMS), lasers, …
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