Lars Mönch & John W. Fowler 
Production Planning and Control for Semiconductor Wafer Fabrication Facilities 
Modeling, Analysis, and Systems

Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of the global manufacturing sector. As the semiconductor industry has become more competitive, improving planning and control has become a key factor for business success. This book is devoted to production planning and control problems in semiconductor wafer fabrication facilities. It is the first book that takes a comprehensive look at the role of modeling, analysis, and related information systems for such manufacturing systems. The book provides an operations research- and computer science-based introduction into this important field of semiconductor manufacturing-related research.

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Introduction.- Semiconductor Manufacturing Process Description.- Modeling and Analysis Tools.- Dispatching Approaches.- Deterministic Scheduling Approaches.- Order Release Approaches.- Production Planning Approaches.- Production Planning and Control Systems.